TH744.3
本文根据自参考剪切干涉技术,采用球面补偿自准直原理,提出了一种新型激光干涉球径义。详细介绍了该球径仪的测量原理,结构及误差分析,并给出了实验测试结果。
A new spherometer based on self-reference laser shearing interferometric technique is described The principles and error analysis of the spherometer are given in detall. Experimental resuits for two optical spherical surfaces are presentes.
荆亚玲 赵明山.一种新型激光干涉球径仪原理与分析[J].光电子激光,1995,(5):257~262