Abstract:Some tests on microhole drilling with polarized pulse laser radiation were discussed.Some factors which affect on microhole quality (i.e.hole shape,depth,conical degree,entrance diameter and exit diameter) in polarized pulse laser drilling were studied and measured in detail,such as pumping energy,aperture selection and its size,the focal length of optical system etc.Some experimental data as well as very good circularity and consistent microhole have been obtained.The superiority of polarized pulse laser drilling is showed finally.