Research on Micro-optoelectronic Integrated Smart Pixels
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摘要:
我们采用 MBE生长出大周期 Ga As/ Al Ga As多量子阱 (MQW)外延材料 ,研制了适用于倒装焊结构的自电光效应器件 (SEED)列阵 ,并与 Si CMOS电路通过倒装焊工艺集成为微光电子集成灵巧象素器件。通过对光电特性测试表明 ,器件具有良好的光探测和光调制性能。
Abstract:
GaAs/AlGaAs multlple quantum well (MQW) structure was grown by molecular beam epitaxy.We have researched and fabricated self electro optic effect device (SEED) arrays for flip chip bonded devices.Some investigation on opotelectronic CMOS SEED smart pixels using a hybrid integration of SEED arrays flip chip bonding directly on silicon CMOS circuits is reported.The measurement results under applied biases show the good optoelectronic characteristics of devices.