In this paper,proton-exchanged LiNbO 3 planar waveguides for new type photonics devices are experimentally studied .By fabricating proton-exchanged LiNbO_3 planar waveguides under different ex periment conditions,characters of the waveguides and the fabrication paramenters are well established.The dispersion relations are found in the guided layer.The esults can be used in the nonlinear optics process in waveguide structures.