The surface morphology of vacuum vapor deposited poly(N-vinylcarbazole)(PVK) thin film and the PVK/indium-tin-oxide(ITO) interface are studied by using the AFM and XPS respectively.The results showed that PVK molecules are large in size and relative uniform;the backbone of PVK molecules and the structure of SnO2 are almost unchanged,while the side group of PVK and the structure of In2O3 are probably modified in the PVK/ITO interface,because a large amount C-O bonds are found in the interface,which cannot be explained by air contamination;Some of the In2O3 molecules at the interface are partially decomposed,and the resulting O atoms substitute the H atoms of PVK subgroups and form the C-O bonds,and the In atoms diffuse into the PVK bulk.