Abstract:With the improvement of measurement velocity in laser heterodyne interference,the theoretical error of laser heterodyne interference seriously restricted the accuracy of measurement.The principle of laser heterodyne interferometer was analyzed,the residual cumulative error in theory was derived,the factors influencing the error were analyzed,and the error was emulated.With the real-time velocity of laser interference obtained,a novel error correction scheme was provided to reduce the residual cumulative error in project.Simulation result shows the residual cumulative error that is up to 17.7 nm can be reduced by the method when the highest speed is up to 1 m/s and the displacement is up to 3 m,and the cumulative is canceled.