A measurement system for 3D static and dynamic characterization of microelectromechanical systems(MEMS),in which stroboscopic imaging,computer microvision and microscopic interferometry were applied,was developed for measuring in-plane-rigid-body motions,surface shapes,out-of-plane motions and deformations of microstructures.A new algorithm of sub-pixel step length correlation template matching based on cubic spline interpolation was proposed to extract the in-plane displacement from vision images with a resolution 0.02 pixel.Hariharan five-step phase-shift interferometry(PSI) algorithm and unwrapping algorithms were adopted to measure out-of-plane motions.The out-of-plane displacement resolution is better than 1 nm.The practicability and reliability of system are illustrated with the study of the static characterizations of a pressure sensor and the dynamic behavior of a microgyroscope.