The laser direct writing(LDW) system SVGLDW 04 with a projection optical system and a spatial light modulator(LCD-SLM) can expose a reduction pattern directly on a photoresist plate.A CCD placed on the conjugation position of LCD-SLM can monitor the imaging quality from the surface of the photoresist plate.According to the different applications the LDW system can fabricate the binary optical elements with various diffraction properties by controlling the exposure times(engraving depth) and the motion mode of the system.The results with two-level phase and four-level phase structure elements have been given in the paper.