Aiming at the incomplete theory of the arrays confocal system,the more accurate theoretical model is built,and the new type of three-zone amplitude pupil filter is presented to improve the 3-D detecting ability of the arrays confocal system.The 3-D imaging equation based on Kirchhoff's diffraction optic theory in the paper is more accurate,and compared with the existing theory,it can describe the image processing system more exactly.Using the evaluation criterion of 3-D superresolution,the design of the pupil filter is optimized.It can reduce the axial and transversal HWHM of the every detecting channel.The results of computer simulation and experiment prove that the filter can improve the axial and traversal resolution at the same time,which can increase the 3-D measure capability.