We propose a chemical polish-etching of optics suface based on the Marangoni interface effect theory and experimental investigations. Marangoni interface effect and chemical polish-etching mechanism are presented,and experimental investigations of chemical polish-etching based on this effect under computer control are performed,including the experiments of etching stability and relationship between etching efficiency and velocity. We finished the primary polish-etch figuring optical surfaces with the device. The results are analyzed by the WKYO apparatus,and the etching function is given under a certain condition.