The laser assisted chemical etching was proposed to apply in the etching of YBCO high temperature superconductor(HTS)film,which was a significant application involving superconductor electronics,laser technique and chemistry.The etched surface characteristics and variations were studied,and important experimental results were provided to control the figure shape,etching period and laser power.The major conclusions include:the wet etching speed of YBCO film was accelerated drastically under laser radiation and increased over time;there was no strict distinction at the edge of laser facula and the surface etching degree of YBCO film transited gradually;the etched surface characteristic was greatly influenced by the crystal direction of LaAlO3 substrate and the etching effect was higher along crystal direction.