A high electrical performance 128×1 solar-blind ultraviolet photodiode was fabricated by the KOH solution surface process.The dark current with the dropping about 3 orders is 6.88×10-9A at reverse bias 8 V by using the surface process technology.The results of SEM and AES measurements have shown that the KOH solution surface process can efficiently remove the N vacancies,dry-etched products and native oxides,which reduces the density of interface states,improves the current-voltage characteristi...