A novel ceramic-based suspended hotplate is designed,which combines the advantages of traditional ceramic gas sensors with micro machined silicon gas sensors.A new mounting style of bonding wire needless is proposed.The thermal conducting process is analyzed and FEM tool is used to simulate the thermal properties of different structures.The Pt heater and electrodes with good performance are sputtered in alumina substrate by controlled lift-off process.The devices with 0.2 mm and 0.4 mm beam width are fabric...