A pre-filling method is proposed to prevent infiltrating.The ZrO2 film is deposited on the pre-deposited and polystyrene(PS)-filled SiO2 film.Then the PS is washed away by dipping in toluene in order to revive the micro-holes of the SiO2 film.At the same time,the infiltrating is restricted.Ellipometry,UV-VIS spectroscopy,atomic force microscopy(AFM) and optical microscopy are used to characterize the thin films.The infiltrating behaviour and laser-induced damage threshold(LIDT) of two-layer solgel SiO_2/ZrO...