The perfect photosensitive SiO2 films with no cracks,small roughness and smooth surface are fabricated by the organic/inorganic hybrid sol-gel method.Then,the main performance of multi-mode interference(MMI) power splitters with the two kinds of UVlight imprinting structures,buried rectangular waveguide and exposed rectangular waveguide,is discussed using three-dimensional finite difference beam propagation method(FD-BPM).The simulated results show that the MMI optical power splitter with the buried structu...