ITO∶Ta films are deposited on glass substrates by magnetron sputtering.Electrical and optical properties of ITO and ITO∶Ta films with different substrate temperature are studied.The doping of high-valence metal element Ta favors a better crystalline structure and leads to the formation of the(400)plane preferred orientation.ITO∶Ta films at low substrate temperature show better electrical and optical properties than ITO films.The doping of Ta improves the figure of merit of ITO films deposited at...