Microstructural,optical and electrical properties of molybdenum doped indiumoxide (IMO,In2O3:Mo) films prepared on glass substrates by electron beam deposition technique at different substrate temperature are investigated in detail.AFM images and SEM images prove that the surface of the IMO films becomes coarse,and transmittance and Hall measurement indicate that optical and electrical properties becomes better when the substrate temperature increases.The IMO film exhibites a low electrical resistivity of 2...