The anodic aluminum oxide(AAO) template on silicon substrate is fabricated by one-step anodization of pure aluminum layer deposited onto p-type silicon <100> substrates in 0.3 M oxalic acid solution at DC 40 V.The current density-time real time curves in the process of anodization of Al layer on silicon substrate are gathered and analyzed.And,the growth mechanism of AAO on silicon substrate is studied.It indicates that the real-time monitoring of current density is important for the fabrication of AAO on si...