A series of Zn1-xMgxO(x=0.00-0.16) films have been prepared on quartz substrates by RF magnetron sputtering.Several characterization techniques,including X-ray diffraction(XRD),scanning electron microscope(SEM),UV-Vis spectrophotometer,and photoluminescence measurement,have been used to investigate the crystal structure,surface morphology,and optical properties of the films,respectively.The results reveal that the obtained films with Mg content x up to about 0.1 are without phase separation;the films are un...