In order to reduce the size of thermopiles and improve the duty cycle of the devices,the close-arranged thermocouples are usually used to form the thermopile.As the impurities in multi-crystal Si can be horizontal proliferation during annealing,pn junction will form at the junctions of the p and n type materials to impact the thermopiles performance.To research the effect of pn junction on the performance of p/n polysilicon thermopiles,two kinds of structures of thermopile devices are designed,and different...