Indium oxide and zinc oxide mixed transparent conductive films are deposited on unheated BK-7 glass substrates by direct current magnetron sputtering,and then are chemical etched in 0.1% hydrochloric acid with different time.The surface morphology,transmittance and electrical properties are analyzed by atomic force microscopy,spectrophotometer and four-probe method,respectively.The experimental results show that the surface roughness and sheet resistance of the samples firstly increase,then decrease and inc...