An integrated Mach-Zehnder interferometer(MZI) sensor chip was designed and fabricated based on SiO2/Si.And the sensing properties were tested using NaCl solution.The tested results show that the response and recovery time of the chip to NaCl solution are 1.0 s and 0.6 s,respectively,the minimum detectable refractive index variation is 2×10-4 RIU,and a good linear response is presented within the refractive index from 1.348 8 to 1.373 6.The feasibility of applying the MZI platform for highly sen...