The transparent conducting Ti-Al codoped zinc oxide(TAZO) films with high transparency and relatively low resistivity have been successfully prepared by direct current magnetron sputtering.Stress,micro-structural and optic-electrical properties of TAZO films were studied.The XRD results show that all the deposited films are polycrystalline with a hexagonal structure and a preferred orientation perpendicular to the substrates along the c-axis.The stress and the electrical resistivity decrease whe...