Ag doped ZnO(ZnO:Ag) thin films were deposited on n-Si(100) substrates by E-beam evaporation technique.The films were subsequently subjected to post annealing at 500,600,700 and 800 ℃ for 4 h under 200 Pa oxygen pressure.The structural,electrical and optical properties of the samples were studied by X-ray diffraction,Van der Pauw method and photoluminescence(PL),respectively.The results show that the samples are polycrystalline.The crystalline performance has been improved by annealing.The cryst...