Transparent conducting Ti-Al co-doped ZnO(TAZO) films with high transparency and relatively low resistivity were successfully prepared on glass substrate and silicon substrate by direct current magnetron sputtering.The strain,structure and optical properties of TAZO films deposited on two substrates were comparatively well studied.Experimental results show that all the deposited films are polycrystalline with a hexagonal structure and a preferred orientation perpendicular to the substrates along...