Using a electron beam gun evaporation method,LaF3 films were grown on K9 glass,Si substrate and fused quartz glass respectively.The films were produced at different substrate temperatures from 200 ℃ to 350 ℃ by increasing step of 50 ℃.The ultraviolet properties of the films were determined by using ultraviolet spectrometry.Atomic force microscopy was used to determine the surface roughness of LaF3 films.Substrate deflection was measured with ZYGO interferometer,and the residual stress was calcul...