Based on the micro-electromechanical system(MEMS)technology,a novel tunable Fabry-Perot(F-P) filter fabricated with the independent optical cavity and electrostatic actuator is presented in this paper.The driven voltage of the tunable F-P filter is reduced largely in the design.The optical design,structure design,MEMS manufacturing process and device test are carried out,and the MEMS FP filters are fabricated successfully.The test results show that the device gets the performance of 40 nm tuning...