An ultra-precision positioning system based on reflective laser Moiré signals is designed.It can achieve high-accuracy position detection and full automatic precision alignment using the reflective 0-th order Moiré signals.In view of the existing non-linearity and the difficulty in obtaining a good performance by traditional PID control,a precision alignment PID control based fuzzy RBF neural network is proposed.This method utilizes the reasoning ability of fuzzy control and the study ability of...