Eu3+ and Li+ co-doped ZnO films were deposited on Si(111) substrates by the pulsed laser deposition(PLD) method,and annealed in vacuum and oxygen,respectively.The photoluminescence(PL) spectra and the X-ray diffraction(XRD) spectra of the films were measured.Through the X-ray diffraction,it can be seen that the ZnO:Eu3+,Li+ films are highly c-axis oriented.Compared with the film annealed at vacuum,when excited under the wavelength of 325 nm,the PL spectra exhibit two bands including a UV band and a blue band,and the PL intensity annealed under oxygen is stronger in the UV region,but weaker in blue region.When the sample irradiated without annealing under the wavelength of 395 nm,obvious emission at the wavelengths of about 594 nm and 613 nm from the rare-earth element of Eu3+ can be observed in the photoluminescence spectra,but only obvious emission at the wavelength of about 594 nm is observed,which shows that annealing is disadvantageous for Eu3+ emission.