Transparent conducting Ti-doped zinc oxide films(ZnO:Ti,TZO)with high transparency and relatively low resistivity have been successfully prepared on flexible PET substrate by DC magnetron sputtering at room temperature.Structural,morphological,stress,optical and electrical properties of ZnO:Ti films are investigated.Experimental results show that all the deposited films are polycrystalline with a hexagonal structure and a preferred orientation perpendicular to the substrates along the c-axis.Sputtering pressure plays an important role on the electrical resistivity of flexible ZnO:Ti films.When sputtering pressure increases from 2 Pa to 6 Pa,the resistivity of the deposited films initially decreases and then slightly increases.At the optimum sputtering pressure of 5 Pa,the lowest resistivity of 4.21×10-4 Ω·cm is obtained.All the films present a high transmittance over 91% in the visible range.