Abstract:A micro-spectrometer based on phase-modulation array structure is presented in this paper.The core component of the spectrometer is a 2-dimensional(2D) array of miniature interferometer which is mounted on an imaging device such as CCD or CMOS.A series of steps made from PMMA construct each interferometer.When the ncident light illuminates the surfaces of the interferometer,the 2D intensity distribution obtained by the imaging device can be described by a system of simultaneous linear equations.One can readily recover the spectral contents of the input radiation by solving the equation system with Tikhonov regularization.The simulation results show that the detection range covers a wide spectrum from 300 nm to 1 100 nm and the wavelength resolution reaches picometer order.In comparison with conventional spectrometers,the new spectrometer has advantages of small size,low cost,high spectral resolution,wide detection range,vibration resistance and real-time operation,which may find wide applications,such as space remote sensing,geological mineral exploration,environmental monitoring,biological detection and so on.