标准CMOS工艺新型多晶硅PIN-LED的设计与实现
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张世林(1953-),男,教授,主要从事半导体 工艺、半导体新型器件与集成技术的研究.

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TN312.8

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国家自然科学重点基金(61036002)资助项目 (天津大学 电子信息工程学院,天津 300072)


Design and realization of a novel polycrystalline Si PIN-LED with standard CMOS technology
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    摘要:

    采用联华电子公司(UMC)0.18μm标准CMOS工艺设 计并制备了多晶硅PIN-LED, 测试结果表明,i区宽为10μm器件的正向导通电压为1.5V,反向击穿电压为8.8V;当其工作在正向载 流子注入模式时发射950~1250nm波段的红外 光,工作在反向雪 崩击穿模式时发射650~1000nm波段的可见光 。实验结果表明,本文以多晶硅材料制备的PIN-LED与单晶硅材料制备 的Si-LED具有类似的电学特性与光学特性。

    Abstract:

    Until now,the optical characteristics of poly-silicon have not been researched and utilized.In order to solve this pr oblem,the PIN-LED is designed and fabricated in the commercial standard 0.18μ m CMOS process which is offered by United Microelectronics Corporation (UMC) wit hout any modification.Experimental results suggest that the forward and reverse breakdown voltages of the device,whose width of i region is 10μm,are 1.5V and 8.8V respectively.The spectrum ranges from 950nm to 1250n m (the infrared band) when it works at the positive carriers injection mode,whil e ranging from 650nm to 1000nm (the visible light band) at the reverse avalanche breakdown mode.It includes three peaks in the infrared ban d,the wavelengths of the two main peaks are λ= 1110nm (E=1.12eV) and λ= 1150nm (E=1.08eV),re spectively,and the wavelength of the secondary peak is λ=1050nm (E=1.18eV).And there is only one main peak in the visible light band,whose wavelength is 730-780nm (1.59-1.70eV).It is confirmed that the PIN-LED made by poly-silicon mate r ials and the LED made by mono-crystalline materials have similar electrical and optical properties,after comparing the above experimental data with the mono-c rystalline′s I-V characteristics and spectra which h ave already been reported.

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张兴杰,张世林,韩磊,郭维廉,侯贺刚,毛陆虹,谢生.标准CMOS工艺新型多晶硅PIN-LED的设计与实现[J].光电子激光,2013,(1):6~10

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  • 收稿日期:2012-07-15
  • 最后修改日期:2012-08-09
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