基于差分方法的高精度球面调整误差校正
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王道档(1986-),男,浙江温州人,博士,讲师, 主要从事光电信息检测的研究.

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TP274

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精密测试技术及仪器国家重点实验室开放基金资助 (1.中国计量学院 计量测试工程学院,浙江 杭州 310018; 2.浙江大学 现代光学仪器国家 重点实验室,浙江 杭州 310027; 3.天津大学 精密测试技术及仪器国家重点实验室,天津 300072)


High-precision calibration of spherical surface misalignment based on difference method
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    摘要:

    针对高精度球面检测中待测球面调整误差所引入 的高阶像差影响,提出了一种基于差分方法的 高精度调整误差校正方法。通过对待测球面分别引入两个不同的波前离焦量,对测得的波面 数据 取差分,由此得到测量中调整误差所引入的高阶像差,并将其从面形数据中分离出来,进而 实现高精度 的球面调整误差校正。通过Zygo干涉仪对提出方法的可行性进行了实验验证,并给出了 实验结 果。测量中,对大数值孔径待测球面同时引入波前离焦和倾斜,运用本文方法实现调整误差 的校正精度达到 了均方根(RMS)为0.001λ和 峰谷(PV)为0.018λ。本文方法无需了解检测系统或待测球面的任何先验信息,并可有效 降低对待测球面调整的要求,在实际的高精度球面检测中有很好的适用性。

    Abstract:

    The misalignment aberration in the hig h-precision testing of spherical surface may introduce a significant error in t he measurement results,especially for the test surfaces with high numerical aper ture,and they are difficult to be completely removed from the meaasured data wit h the traditional misalignment calibration method.This paper presents a high-pr ecision way based on the difference method for the calibration of spherical surf ace misalignment,in which significant high-order aberrations introduced by misa lignment can be observed.With the different wavefront obtained from the measured wavefronts corresponding to two slightly different defocusing amounts,the high -order aberrations due to misalignment are obtained and separated from the wave front under test,by which high-precision misalignment calibration can be realiz ed.The experiment with Zygo interferometer is carried out to demonstrate the fea sibility of the proposed method.Both the wavefornt defocus and tilt are introduc ed in the high-numerical-aperture spherical surface under test,and an accuracy of root-mean square value of 0.0015λ and peak -to-valley value of 0.0189λ is ach ieved with the proposed misalignment calibration method in the experimental vali dation.The proposed method requires no foreknowledge about the testing system an d testing surface,lowers the requirement on the test surface adjustment,and it i s of significant applicability for the high-precision shperical surface testing .

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王道档,杨甬英,陈晓钰,邵卫红.基于差分方法的高精度球面调整误差校正[J].光电子激光,2013,(1):127~132

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  • 收稿日期:2012-07-04
  • 最后修改日期:2012-08-31
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