新型簧片式光纤加速度传感器研究
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张敏(1971-),男,博士,副教授,博士生导师,主要从 事光纤分布式传感、光纤地震检波、光纤海底石油及目标探测等光纤传感相关研究.

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国家“863”计划(2006AA09A102-03)资助项目 (1.天津大学 精密测试技术及仪器国家重点实验室,天津 300072; 2.清华大学 集成光电 子学国家重点实验室,北京 100084)


A new fiber-optic flexible reed accelerometer
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    摘要:

    研制了一种新型光纤加速度传感器。基于迈克尔逊干涉仪原理,采用了质量块和可 弯曲簧片结构,通过使用竖直 绕制传感光纤和横向绕制参考光纤的方式提高了加速度传感器的加速度灵敏度。实验测试了 其加速度灵敏度以及横向串扰。在簧片厚为1mm、质量块质量为208 g时,其加速度灵敏度 可达556rad/g(g为重力加速度);在噪声本底为10-4 rad/Hz 、加速度传感器工作频率为100Hz时,其可探测的最小加速度信号为 200ng/Hz(g为重力加速度)。采用该全金属结 构,传感器可更好地用于微弱信号检测。

    Abstract:

    In order to realize a high acceleratio n sensitivity,we propose a novel all-metal fiber-optic accelerometer based on Michelson interferometric configuration and using flexible reed structure,by wi nding sensing arm in axial direction an d reference arm in transverse direction to improve the accelerometer′s energy c onversion efficiency to enhance acceleration sensitivity.Meanwhile,such a struc ture can decrease the interference between the sensing and reference arms.In this paper,the fundamental principle and the design of the novel sensor are intr oduced respectively,and the acceleration sensitivity and resonance frequency of this sensor are analyzed theoretically.The acceleration sensitivity and crosstal k are measured by an experiment.When the thickness of the reed is 1mm and the q uality of the mass is 208g,the acceleration sensivity of the accelerometer is 556rad/g (54.9dB).A method is proposed to improve the accelereation sensitivit y.Moreover,the crosstalk of the accelerometer is studied and the reason why the accelerometer receives a different crosstalk in a different direction is found.A t last,the measurement results imply that when the resolution is 10-4 ra d/Hz (100Hz).The minimum detectable acceleration signal of this accelerometer is 200ng/Hz.With this all-metal s tructure,the fiber optic flexible reed accelerometer can better adapt to the spe cial requirements of weak signal detection.

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杨昌,周宏朴,张敏,王凯,段发阶,廖延彪.新型簧片式光纤加速度传感器研究[J].光电子激光,2013,(2):209~214

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  • 收稿日期:2012-08-20
  • 最后修改日期:2012-10-15
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