基于滤波的准直光束漂移反馈补偿方法研究
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李结安(1980-),男,安徽合肥人,博士研究生,主要从事激 光准直及光电检测等研究.

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Study on method of feedback compensation drift of collimation beam based on filt er
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    摘要:

    针对光束漂移对超精密激光准直测量影响大且其 难以从实际测量信号中有 效提取的问题,提出一种基于滑动均值滤波的准直光束漂移反馈补偿方法。方法通过滑动均 值滤波器抑制干扰噪声影响,从实际微弱检测信号中有效提取出其中的光束漂移成分及其 变化趋势,并将其作为反馈量;进而利用压电偏转 镜对光束漂移量进行实时反馈补偿,以抑制其对激光准直测量稳定性的影响。实 验结果表明,经本文方法补偿的激光器出射光束在140s内1m准直距 离处,光束漂移量标准 差X方向从2.66×10-8 rad下降 到4.13×10-9 rad,Y方向从1.74×10- 8 rad下降到3.97×10-9 rad,有效地提高 了激光准直测量光束的方向稳定性。

    Abstract:

    To solve the problem that beam drift errors have a significant impact on the performance of ultra-precision laser collimation measurement systems and th ey are difficult to be extracted,a real-time compensation method is presented base d on average filter.In this method,the influence of interference noise is suppresse d with a moving average filter, and useful beam drift signal and its trend,as compens ation variation,are effectively extracted from actual weak detection si gnals.In this way, beam drift is then real-time feedback compensated by using of a Piezoelectric t ilting mirror system,in order to suppress its impact on the stabil ity of laser collimation system.Experiment results indicates that:when the output beam is tested in this method with distance of 1m over 140second,the standard deviation of beam drift in Xdirection is decreased from 2.66×10-8 rad to 4.13×10-9 rad,and in Y direct ion from 1.74×10-8 rad down to 3.97×10-9 rad.In another word,t he directional measurement stability is effectively improved for the laser colli mation measurement system.

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李结安,谭久彬,崔继文.基于滤波的准直光束漂移反馈补偿方法研究[J].光电子激光,2013,(2):336~342

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  • 收稿日期:2012-06-07
  • 最后修改日期:2012-08-20
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