一种基于Pd-Y合金纳米膜的光纤H2传感器
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宋涵(1988-),男,博士研究生,主要从事光纤中微传感 器的研究.

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国家自然科学基金(50974062)资助项目 (华中科技大学 机械学院,湖北 武汉 430074)


A kind of optical fiber H2sensor based on Pd-Y alloy nano-film
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    摘要:

    为提高光纤H2传感器的响应速度、稳定性和可 重 复性,本文分析了Pd-H传感机理,进而提出利用双靶溅射工艺在石英光学玻璃基底上制 备55nm厚的Pd-Y合金H2敏薄膜,采用双光路 检测技术设计并实现了反射式光纤束H2传感器系统。通、放H2实验结果表明,本文 研制的基于Pd-Y合金纳米薄膜的 传感器具有响应快速的特点,特别是在多次循环老化实验后表现出良好的稳定性和可重复性 。

    Abstract:

    In order to obtain a high sensitivity and stability to hydrogen,an optical fiber sensor based on palladium-yttrium (PdY) allog nano-film is designed and fabri cated in this paper.A cleaning process was used to wash a substrate of quartz gl ass and targets to obtaine good binding performance between film and basement.Th e 55nm thick PdY film was deposited on the substrate by the double-target reac tive magnetron co-sputterng,in which the atom content of yttrium is 10%.And a 5nm-thick pure palladium protective layer was deposited on the film at last to prevent it from oxidation.The reflective optical fiber bundle sensor system with a single light source and double light paths was designed and realized.The info rmation containing hydrogen concentration was extracted through a division opera tion between the testing light path and the reference one.This sensor system was tested by standard gas and dry air.The results show that it exhibits long time stability to dry air and has response time of 343s,266s and 187s to 1.5%,3.0% and 4.0% hydrogen,respectively.Although the sensor has zero drift to the standa rd gas at different degrees.it shows strong stability and repeatability in respo nse value and increment of zero after three or four cycles of test.

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宋涵,刘繄,陈幼平,张冈.一种基于Pd-Y合金纳米膜的光纤H2传感器[J].光电子激光,2013,(3):439~444

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  • 收稿日期:2012-09-13
  • 最后修改日期:2012-10-11
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