In+Cd共掺杂ZnO薄膜的光电性能研究
DOI:
CSTR:
作者:
作者单位:

作者简介:

郑必举(1982-),男,山西大同人,博士,讲师,主要从事 透明导电氧化薄膜的制备及其光电性能研究.

通讯作者:

中图分类号:

基金项目:

云南省科技(KKSY201251089)资助项目 (昆明理工大学 材料科学与工程学院云南昆明 650093)


Optical and electrical properties of In+Cd co-doped ZnO thin films prepare d by PLD method
Author:
Affiliation:

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    通过脉冲激光沉积(PLD)在石英玻璃基底上沉积了 四元Zn0.86Cd0.11In0.03O(ZCIO)合金半导体薄膜 。其中,Cd的掺杂是 用以改变ZnO的光学禁带宽度,In是用以提高载流子浓度。X射线衍射(XRD)分析证实,ZCIO 具有六方纤锌 矿结构而没有其它相(如CdO和In2O3相)出现。场发射扫描电子显微镜(FE-SEM)观察到Z CIO薄膜的晶粒尺 寸要比未掺杂ZnO的小。所有薄膜在可见光范围内都有很高的透过率(≈85%)。最重要 的是,在保持了Zn1-xCdxO 薄膜的光学特性外,ZCIO薄膜的电学性能得到了改善 ,低的电阻率(4.42×10-3 Ω·cm)和高的载流子浓度(5.50×1019 cm- 3),使得它比Zn1-xCdxO 薄膜更具应用价值。

    Abstract:

    Zn0.86Cd0.11In0.03O alloy semiconductor thin film was deposite d on quartz substrate by pulsed laser deposition (PLD) technique at room temperature .Cd is used to change the optical band gap and In is used to increase the carrier concentration of the ZnO thin film.The X-ray di ffrac tion (XRD) studies confirm that the structure of Zn0.86Cd0.11In0.03O is hexagonal wurtzite wit hout CdO phase,keeping the crystalline structure and lattice parameters close to those of ZnO film.The cold field emission scanning electron microscope shows th at the grain size of Zn0.86Cd0.11In0.03O film is smaller than that of ZnO.XPS measurement is used to prove that In has been doped into ZnO thi n films.These thin films are highly transparent (~85%) in visible region of sola r spectrum.The PL spectra and the band gap of the Zn0.86Cd0.11In 0.03O film show substantial red shift to the visible light region,which can be interpreted in terms of band gap modulation due to Cd doping.Most importantly,t he electrical properties of Zn0.86Cd0.11In0.03O thin film are highly improved with In doping.It has low resistivity (4.42×10-3 Ω·cm) and high carrier concentration (5.50×1019 cm-3).Both the low elec tric resistivity and large transparent wavelength range enable this film a promi sing candidate for window layer in solar cells and other possible optoelectronic applications.

    参考文献
    相似文献
    引证文献
引用本文

郑必举,胡文,刘洪喜. In+Cd共掺杂ZnO薄膜的光电性能研究[J].光电子激光,2013,(3):539~545

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2012-08-30
  • 最后修改日期:2012-09-27
  • 录用日期:
  • 在线发布日期:
  • 出版日期:
文章二维码