液晶空间光调制器波前模拟及误差补偿
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张洪鑫(1966-),女,吉林省吉林市人,博士,教授.主要 从事全息测量和光信息处理方面的研究.

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国家自然科学基金(61178069)和黑龙江省自然科学基金(F201117)资助项目 (1.哈尔滨理工大学机械动力工程学院,黑龙江哈尔滨 150080; 2.哈尔滨工业大学超 精密光电仪器工程研究所,黑龙江哈尔滨 150080)


Wavefront generation and error compensation by liquid crystal spatial light modulator
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    摘要:

    反射式液晶空间光调制器(LC-SLM)反射基板的 曲率误差和液晶盒的边缘 场效应导致波前模拟精度下降问题,本文研究用LC-SLM模拟波前, 通过静态误差补偿法和残差反馈法,探讨提高波前模拟精度的有效方法。实验结果表明,LC -SLM能较好模拟基于Zernike多项式的离焦、像散、彗差和球差等8项波像差,但是具有一 定的模拟误 差,均方根误差(RMS)值平均为0.265λ ,静态误差补 偿法和残差反馈法使波前模拟误差RMS值分别降低到 0.223λ 和0.170λ,残差反馈法更有效。提高波前模拟精度能够使LC-SLM在 自适应光学技术、飞秒激光加工、实时全息显示和光学测量等领域具有更大的应用前景。

    Abstract:

    Liquid crystal spatial light modulator (LC-SLM) is a perfect wavefront generato r.As a dynamic diffractive device,it has some advantages such as high resolution ,low cost,small-size pixels and real-time programming. For a reflecting LC-SLM,the curvature error of its reflective substrate and the fringe field effect of liquid crystal cell can reduce the wavefront generation precision to limit the device′s application in wavefront control field.We research the wavefront generation method using liqui d crystal spatial light modulator. In order to find an effective method to improve the wavefront generation precisi on,the static-error compensation and residual-error feedback methods are proposed.The experimental results show that liquid crystal spatial light modulator can give good performance on generating eight wavefront aberations including defocus, astigmatism,coma and spherical aberration based on Zernike polynomials.But the RMS of generation errors is averagely 0.265λ.The RMS of gen eration errors respectively reduces by 0.223λ and 0.170λ by using static-error compensation and residual-error feedback methods,and abviously the latter metho d is more effective.Improving the wavefront generation precision can make LC-SLM h ave wide application in adaptive optic,femtosecond laser processing,real-time holography display and optical m easurement fields.

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张洪鑫,张健,乔玉晶,司俊山,马薇.液晶空间光调制器波前模拟及误差补偿[J].光电子激光,2013,(5):838~842

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  • 收稿日期:2012-10-24
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