HCl气体辅助生长GaN纳米线阵列与机理研究
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王新中(1979-),男,安徽安庆人,博士,副教授,主要从 事GaN基材料及器件研究.

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国家自然科学基金(61240015)、广东省自然科学基金(S2012010010030)和深 圳市科技计划(JCYJ20120615101957810,JCYJ20130401100513002)资助项目 (1.深圳信息职业技术学院,广东 深圳 518029; 2.中国科学院上海微系统与信息技术研究所,上海 200050)


Fabrication and mechanism investigation of nanowire array on GaN substrate with the assistance of HCl gas
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    摘要:

    研究了一种无金属催化剂生长 GaN纳米线阵列的方法。通过HCl气体作为催化剂,利用氢化物气相外延(HVPE)系统在GaN/sa pphire模板上制备出纯净的 GaN纳米线阵列;利用扫描电镜(SEM)、能量分散X射线荧光(EDX)谱和透射电镜(TEM) 测试,研究了生长条 件的变化对GaN纳米线阵列的影响,分析了GaN纳米线阵列的生长过程并探索了其生长机理, 为GaN纳米线阵列的可控生长提供了理论依据。

    Abstract:

    One-dimensional gallium nitride (GaN) nanostructures have both GaN mat erial advantages and low-dimensional features,which can be used to study the electrical mate rials,thermal conductivity,mechanical properties and di mensions,due to their unique applications in mesoscopic physics and nano-devices.In order to obtain pure ni tride nanowires,this paper researches a way on the growth of GaN nanowire array without any metal catalyzer .With the aid of hydrochloric (HCl) gas,an array of GaN nanowires without any me tal impurity was grown on a 3μm GaN/sapphire template in a hydride vapor phase epitaxy (HVPE) reaction chamber.Variable structures of the GaN nanowires corresponding to different temperatures (700℃,780℃ and 900℃) were characte rized by scan electron microscopy (SEM) image,transmission electron microscopy ( TEM) image and energy dispersive X-ray spectroscopy (EDX),which indicate that the growth of GaN nanowires is obviously sensitive to temperature.A uniform vertical array could be got at 780℃,and the diameter and length of the corresponding GaN nanowire are about 80nm and 1.5μm,respe ctively.Moreover,the growth mechanism of the GaN nanowires is explored,which suggests that the hyd rochloric gas plays an important role as catalyer during growth process.

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王新中,于广辉,李世国. HCl气体辅助生长GaN纳米线阵列与机理研究[J].光电子激光,2014,(5):903~907

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  • 收稿日期:2013-10-20
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