Cu溅射诱导增强量子阱混杂实验研究
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朱洪亮(1957-),男,湖南人,博士生导师,长期致力于半 导体光电子功能集成材料和光子集成器件的研究与开发.

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国家自然科学基金(61320106013,61274071)资助项目 (1.中国科学院半导体研究所,材料科学重点试验室,北京100083; 2.School of Engineer ing,University of Glasgow,Glasgow,G128LT)


Study on enhanced quantum well intermixing by Cu sputtering
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    摘要:

    在InP基异质结InGaAsP多量子阱(MQW)结构上 溅射Cu/SiO2复合层,开展了量子阱混杂(QWI) 材料的实验研究。经快速退火(RTA),实现了比常规无杂质空位扩散(IFVD)方法更大的带 隙波长蓝移量。 在750℃、200s的退火条件下,获得最大172nm的波长蓝移;通过改变退火条件,可实现不同程度的蓝 移,满足光子集成技术中不同器件对带隙波长的需求。为了验证其用于光子集成领域的可行 性,利用混杂 技术分别制备了宽条激光器和单片集成电吸收调制激光器(EML)。在675℃退火温度,80s、120 s的退火时间下分别实现了61、81nm的波 长蓝移;并且,相应的宽条激光器的电激射光(EL)谱 偏调量与其材料的光致荧光(PL)谱偏调量基本一致。在675s退火条件下,制备的EML集成器 件中,电吸收调制器(EAM)和分布反馈(DFB)激光器区的蓝移量分别83nm和23.7nm,相对带隙差为59.3nm。EML 集成器件在激光器注入 电流为100mA、调制器零偏压时出光功率达到9.6mW;EAM施加-5V反向偏压时静态消光比达16.4dB。

    Abstract:

    Quantum well intermixing (QWI) using sputtered Cu/SiO2layers is demo nstrated in InP-based heterostructure of InGaAsP multiple quantum wells.The bandgap energy could be m odulated by adjusting the annealing conditions to satisfy the need of bandgaps in different devices.A max imum wavelength shift of 172nm could be realized with an annealing condition of 750℃ and 200s,which is muc h larger than the common impurity free vacancy disordering.In this paper,the QWI technology is used to fabricate the broad area lasers and electro-absorption modulated laser (EML) to explore its feasibility in phot onics integrated circuits.The bandgap blue-shifts of 61nm,81nm and 98nm are realized with the annealing t ime of 80s,120s and 200s at an annealing temperature of 675℃ for the preparation of broad area lasers.The EL wavelength blue shift of the corresponding MQW material after QWI is almost in accordance with that of the P L wavelength.The wavelength bule shifts are 83nm and 23.7nm for EA and DFB regions,respectivel y with annealing time of 120s at 675℃,which induces a relative bandgap detuning of 59.3nm.The outpu t power of the fabricated EML could reach 9.6mW with 100mA injection current of laser at 0V reverse volta ge of EAM.The extinction ration is about 16.4dB with a reverse voltage of -5V for EAM.

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崔晓,张灿,梁松,Hou Lianping,朱洪亮. Cu溅射诱导增强量子阱混杂实验研究[J].光电子激光,2014,(7):1332~1337

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  • 收稿日期:2014-03-21
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