The key technologies of flexible monolithically series-integrated a -Si thin film modules on polymer substrate are studied and the modules are fabricated.Tandem a-Si/ a-SiGe solar cell can obtain higher convention efficiency and laser scribing is very important in monolithic module fabrication.The SiGe grading band gap,laser scribing of nip typed solar cell a nd electrical curing to remove shunts are discussed and used to improve monolithic module′s perform ance.On polyimide substrate,the back reflector Ag/ZnO is sputtered by roll-to-roll sp uttering machine,the n-i-p a-Si/a-SiGe is deposited by roll-to-roll plasma enhanced chemical va por deposition (PECVD) machine,and the ITO layer is sputtered by roll-to-roll sputtering machine with a mask.At last,monolithic series integr ation is obtained by laser scribing and screen printing.A monolithic module includes five cell strip es,and the best conversion efficiency is 5.424%(AM0,0.1cm²)with open volt age of 7.156V.