高品质因子聚合物可重构微环谐振腔滤波器
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(东南大学 先进光子学中心,江苏 南京 210096)

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恽斌峰(1979-),男,博士,研究员,主要从事集成 光子器件研究.

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A reconfigurable polymer micro-ring resonator filter with high quality factor
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(Advanced Photonics Center,Southeast University,Nanjing 210096,China )

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    摘要:

    以聚合物ZPU-44和聚砜(PSU,polysulfone risi n)分别作为波导包层和芯层材料,采用倒脊形波导结构,设计并 优化了聚合物可重构微环谐振腔滤波器的波导截面参数、弯曲半径、耦合区波导长度和间距 以及调谐电极 等结构参数,分析了其谐振滤波特性。采用传统的微加工工艺制备了聚合物可重构微环谐振 腔滤波器并进 行了测试。结果表明,其在通信波段1550nm附 近的自由光谱范围(FSR)为0.15nm,3dB带宽约为0.0235nm, 品质因子Q达6.60×104,在0~ 4V电压范围内实现了0.5~12.95dB消光比的调谐,且 谐振波长调谐一 个FSR的电压为4.75V,与理论设计基本 相 符。本文的聚合物可重构微环谐振腔滤波器可用于集成波导可调谐光延时线和可调谐滤波。

    Abstract:

    A polymer reconfigurable micro-ring resonator filter,which is based on inverted ridge waveguide structure using ZPU-44and polysulfone (PSU) as the wavegui de cladding layer and core layer materials,respectively,is theoretically designed and optimized,inc luding the waveguide cross section size,the bending radius,the coupling length,the coupl ing gap size, and the thermo-optic tuning electrode parameters.In addition,the characterist ics of the polymer reconfigurable micro-ring resonator filter are analyzed.The polymer reconfigur able micro-ring resonator,which is fabricated by the traditional micro processing technology,is tested,and the results show that around the wavelength of 1550nm,the free spectral range (FSR),3dB bandwidth and quality factor Q of the polymer reconfigur able micro-ring resonator are 0.15nm, 0.0235nm and 6.60×104,respectively.What′s more,the extin ction ratio of the micro-ring resonator filter can be tuned from 0.5dB to 12.95dB in the voltage range from 0V to 4V .And only 4.75V is needed to tune the resonant wavelength of the micro-ring resonator filter ac ross an FSR,which is nearly the same as the simul ation re sults.The reconfigurable polymer micro-ring resonator filter is very useful for integrated waveguide tunable opt ical delay line and tunable filter.

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李玲玲,恽斌峰,胡国华,沈学可,丁森,崔一平.高品质因子聚合物可重构微环谐振腔滤波器[J].光电子激光,2015,26(4):682~687

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  • 收稿日期:2015-01-21
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  • 在线发布日期: 2015-05-25
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