This paper proposes a new type of laser beam tracking atomic force mic roscope (AFM).A specially designed AFM probe is developed.It consists of a scan tracking path for tracking XY scanning by a tracking lens moving with XY scanner,which enables the laser beam to track XY scanning of microprobe (can tilever).Meanwhile,a specific feedback tracking path is employed to realize accurate detection of cantilever d eflection,and eliminate the noise caused by Z feedback movement of microprobe.Experiments are car ried out by this AFM using samples with different structures,including nano-pores of porous alumina,nanoimprint structure on po lycarbonate film and large-scale structures on a sapphire glass substrate.The results show that the AFM system h as not only good XY scanning tracking feature but also excellent Z feedback tracking performan ce.With scanning tracking path and feedback tracking path,the AFM system is of innovative principle,ingenious method,excellent imaging perfo rmance and high resolution.By utilizing tip-scanning mode,this AFM system overcomes the limitations of conve ntional sample-scanning AFMs,and is capable of achieving image scanning and acquisition for samples with different s izes and different weights.These outstanding characteristics enable this AFM technique to be widely applied in th e fields of micro/nano-technology.