基于聚酰亚胺的FBG湿度传感特性及细观特征研究
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(1.西安科技大学 能源学院,陕西 西安 710054; 2.教育部 西部矿井开 采与灾害防治重点实验室,陕西 西安 710054)

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柴敬(1964-),男,宁夏平罗人,教授,博 士生导师,主要从事采矿工程、实验岩石力学及光纤传感监测技术方面的研究.

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国家自然科学基金(41027002,51174280)和高等学校博士学科点专项科研基金(20126121110003)资助项目 (1.西安科技大学 能源学院,陕西 西安 710054; 2.教育部西部矿井开 采与灾害防治重点实验室,陕西 西安 710054)


Characterization and substructure morphology of a polyimide-coated FBG humidity sensor
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(1.College of Energy Science and Engineering,Xi′an University of Scie nce and Technology,Xi′an 710054,China; 2.Key Laboratory of Western Mine Exploitation and Hazard Prevention,Xi′an 710054,China)

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    摘要:

    实现了一种采用聚酰亚胺(PI)薄膜材料涂敷的光 纤布拉格光栅(FBG)湿度传感器,并研究了其表面涂覆结构、湿度传感特性、稳定性及迟滞 特性。采用新的PI溶液的制备工艺,提出了一种增强PI溶液与光纤栅区的耦合方法,并利用 扫描电镜(SEM)确定出4种典型的表面涂覆结构。实验结果表明,当FBG湿度传感器的PI涂覆 厚小于75μm时,湿度特性曲线拟合度大于0.99,标准差 小于0.5;温度特性曲线拟合度大于0.98,标 准差小于0.5;其中,45μm厚的FBG湿度传感 器 湿度灵敏度为7.9pm/%RH,误差度为2.19%, 迟滞性误差为2.6%,稳定时相对湿度波动范围小于0.8%RH。

    Abstract:

    This paper presents a kind of relative humidity (RH) sensor,which is based on fi ber Bragg grating (FBG) coated with polyimide (PI).Substructure morphology,humid ity sensing characteristics, long-term stability and hysteresis characteristics of the humidity sensor are s tudied.The preparation and coating processes of PI are improved,and a new method to enhanc e the coupling between PI solution and optical fiber grating is proposed.Four typical surface coating structures are determined by scanning electron microscopy (SEM).Experimental results show that the PI coating thickness is less than 75μm,the fitting degree of humidity characteris tic curve is greater than 0.99,the standard deviation is less than 0.5,the fitting degree of temperat ure characteristic curve is more than 0.98,and the standard deviation is less than 0.5.The humidit y sensitivity of the sensor is 7.9pm/%RH,and the nonlinear error is 2.19% at 45μm coated thickness .Hysteresis error is 2.6%,and the relative humidity fluctuation range is less than 0.8%RH.The deve loped device can realize the temperature compensation for humidity measurement sensor.The FBG humidity sensor also has good repeatability and stability.When compared to the conventional techniques,the novel fiber optic sensor provides a robust,relativel y low-cost and continuous monitoring method.

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柴敬,刘奇,张渤,李毅,张丁丁,袁强.基于聚酰亚胺的FBG湿度传感特性及细观特征研究[J].光电子激光,2016,27(3):239~246

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  • 收稿日期:2015-11-06
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  • 在线发布日期: 2016-04-14
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