基于硅基双微环谐振腔的高灵敏度电流传感器
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(浙江大学 信息与电子工程学院,浙江 杭州 310027)

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李宇波 (1977-),男,内蒙古人,博士,副教授,主要从事光 电子理论研究.

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国家“863计划”(2015AA017001)和浙江省自然科学基金(LY14F050005)资助项目 (浙江大学 信息与电子工程学院,浙江 杭州 310027)


High-sensitivity photonic current sensor based on Si dual-ring resonator
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(College of Information Science and Electronics Engineering,Zhejiang Univers ity,Hangzhou 310027,China)

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    摘要:

    提出并制作了基于硅(Si)基双微环谐振腔的高灵敏 度电流传感器。所设计的Si基双微 环谐振腔的输出功率对波导内传输TE模的有效折射率变化非常敏感,探测由有效折射率变 化造成的输出功率改变可实现高灵敏度微弱电流传感。在设计的Si基微环上集成了具有较高 加热效率的TiN 电阻,当有电流通过该电阻时,电阻发热并改变波导内传输TE 模的有效 折射率,最终造成微环输出功率改变。通过光功率计检测不同输入电流下微环输出功率,即 可 实现对电流的测量。实验结果表明,制作的微环传感器在测试范围为0~6mA时,灵敏度 高达1575dBm/A,线性相关系数 R2大于0.999

    Abstract:

    In this paper,we propose and demonstrate a compact silicon photonic current sensor based on Si dual-ring resonator.The output power of the designed dual-ring resonator is h ighly sensitive to the effective refractive index of the TE mode propagating in the ring.The dual-ring resonato r is fabricated on silicon-on insulator (SOI) by the CMOS compatible process,and the TiN resistors with high h eating efficiency are fabricated in the ring.The current flowing through the integrated resistive TiN heater produc es Joule′s heat and changes the temperature,which results in the change of refractive index of the TE mode.Fin ally,the output power of the dual-ring resonator is changed.In low current,the output power of the dual-r ing resonator has almost a linear dependence on the current flowing through the TiN heater.A photoelectric detect or is used to measure the change of the output power under different input currents. Our experimental results show that the proposed sensor achieves a sensitivity of 1575dBm/A and a g ood l inearity (R2>0.999) in the test range of 0-6mA.Th e footprint of the sensor is 70μm×90μm ,which is quite compact for on-chip current sensing.Meanwhile,the proposed sensor can be applied in areas such as electronic pulse detection and i ntegrated optoelectronic interconnects.

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魏兵,戴庭舸,王根成,赵昌云,周柯江,杨建义,李宇波.基于硅基双微环谐振腔的高灵敏度电流传感器[J].光电子激光,2017,28(2):128~132

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  • 收稿日期:2016-04-06
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  • 在线发布日期: 2017-03-20
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