新型CIGS阻挡层多横向界面Mo的特性及对器件性能的影响
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(1.南开大学 现代光学研究所,光信息科学技术教育部重点实验室,天津 300071; 2.天津市光电子薄膜器件与技术重点实验室,天津 300071)

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林列(1963-),男,天津人,博士,研究员,博士生导师, 研究方向为 光电材料、器件与光学传感、生物医学.

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国家自然科学基金(61504067)资助项目 (1.南开大学 现代光学研究所,光信息科学技术教育部重点实验室,天津 300071; 2.天津市光电子薄膜器件与技术重点实验室,天津 300071)


Characteristic analysis of multi transverse interface Mo film as a new type CIGS diffusion barrier and its influence on the device performance
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(1.Institue of Modern Optics,Tianjin;Key Laboratory of Optical Information Scien ce and Technology of Ministry of Education,300071,China; 2.Key Laboratory of Pho toelectronic Thin Film Devices and Technique of Tianjin Nankai University,Tianji n 300071, China)

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    摘要:

    采用磁控溅射方法,在不锈钢箔上制备多横向界 面Mo(M-Mo,multi-transverse interface Mo)和单横向界面Mo(S-Mo)薄 膜,并利用共蒸发三步法分别在M-Mo和S-Mo薄膜上制备Cu(In,Ga)Se2(CIGS)薄膜及 器件。通过二次离子质谱仪(SIMS)、X射线衍射仪(XRD)和扫描电子显微镜(SEM)研究了不同 结构的Mo薄膜对CIGS影响。通过I-V测试,表征M-Mo和S -Mo作为背电极的CIGS电池电学性能。XRD结果显示,M-Mo和S-Mo 薄膜均以(110)为择优取向。SEM结果显示,M-Mo薄膜相对 于S-Mo,薄膜晶粒 较小,粗糙度较大。J-V测试结果显示,M-Mo薄膜作为背 电极的电池的开路电压Voc、短路电流J sc和填充因子(FF)均有所提高。

    Abstract:

    Mo films with multi-transverse interfaces and single-transverse inte rface are deposited on stainless steel foil using magnetron sputtering process,a nd then Cu(In,Ga)Se2(CIGS) absorbers are deposited on Mo films with multi-transverse interfaces and single-transverse i nterface respectively. The effects of different structured Mo films on CIGS films are characterized by secondary ion mass spectroneter (SIMS),X-ray diffraction (XRD) and scanning electron microscopy (SEM).In addition,the electrical properties of CIGS solar cell with different st ructured Mo films are characterized by I-V measurements .XRD results shows that the preferred orientations of the multi-transverse inte rface Mo (M-Mo) thin film and the single-transverse Mo (S-Mo) film are (110). SEM results demonstrate that compared with S-Mo fi lm,the grain size of the M-Mo films is smaller and roughness is larger.J-V test results suggest that the open circuit voltage (Voc),short c ircuit current Jsc and fill factor (FF) are all improved when M-Mo film is used as back contact.

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李博研,刘芳芳,孙云,林列.新型CIGS阻挡层多横向界面Mo的特性及对器件性能的影响[J].光电子激光,2018,29(2):129~132

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  • 收稿日期:2017-05-16
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  • 在线发布日期: 2018-03-15
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