Er-doped LiNbO₃(Er:LiNbO₃) films with high c-axis oriented crystallites were prepared on SiO₂/Si substrates by pulsed laser deposition (PLD) with dual targets (Er₃O₂/LiNbO 3) alternately.The fabricated Er-doped LiNbO_3films were characterized by X-ray diffraction (XRD),field emission sc anning electron microscopy (FESEM),step meter and photoluminescence (PL) spectrum.The effects of substrate temperature,o xyg en pressure and deposition time on the crystallization,surface morphology and luminescence properties of Er:Li NbO_3films were investigated.The results show that when the substrate temperature is lower than 300℃,the Er:L iNbO_3thin film is amorphous film.With the increase of substrate temperature,the diffraction peak of (006) appears and its peak intensity is increased.The impacts of oxygen pres sure on the preferential orientation and the (006) diffraction peak intensity of the Er:LiNbO_3thin film obtained b y dual targets deposition are not obvious.With the increase of the deposition time,the Er³⁺ concentratio n in the Er:LiNbO_3film is increased,but the c-axis orientation of the film crystallization is d ecreased.When the samples are pumped at 532nm,a strong room-temperature PL spectrum peak centered at 1537nm is yielded.Moreover,PL intensity is increased with the increase of the deposition time.