一种基于清晰度的显微浮雕轮廓术
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(四川大学 电子信息学院,四川 成都 610065)

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付光凯(1989-),男,博士研究生,主要从事三维测量、光信 息处理方面的工作.

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国家高技术研究发展计划(863计划)(2007AA01Z333)和国家科技重大专 项(2009ZX02204-008)资助项目 (1.四川大学 电子信息学院,四川 成都 610065)


An embossment profilometry based on microscopic imaging sharpness
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(College of Electronics and Information Engineering,Sichuan University,Chengdu 610065,China)

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    摘要:

    提出了一种基于清晰度的显微浮雕轮廓术。 采用5倍显微物镜,将正弦条纹通过投影仪从显 微镜目镜瞳口处耦合投射到载物台上,按照一个合适的步长移动Z轴,用CCD采集一系列不同 离焦量下 的条纹图像,用variance清晰度评价函数计算清晰度与离焦量之间的归一化曲线图,由此建 立清晰度与高 度的查找表;然后,放入待测浮雕物体,用CCD采集对应的条纹图像,采用图像分割分解不 同浮雕高度的 区域,再计算各区域内条纹的清晰度,根据查找表查找相应的高度,从而得到待测浮雕物体 不同区域的高 度信息,以此来重构浮雕物体的三维形貌。实验仿真分析证明了该方法的可行性,硬币上数 字为“0”的浮雕 物体表面三维形貌重建结果证明了该方法的有效性,其误差范围在[-2μm,2μm]之间 。

    Abstract:

    A new method to reconstruct embossment three dimensional (3D) shape ba sed on microscopic imaging sharpness is proposed.In this method,a sinusoidal grating is projected onto t he stage by a projector coupled from the microscopic eyepiece pupil through a objective with 5× magnification,the fringe images in different defocus distances are captured by CCD with moving a proper step along Z axis,so th e imaging sharpness to height look-up table can be built by calculating the normalized curve between the imaging sharp ness and defocus distances with variance sharpness evaluation function. Then the measured embossed object is pla ced on the stage and the corresponding deformed fringe is captured by CCD,the fringe areas at different sharpness are extracted by image segmentation algorithm.By calculating these segmented fringe imaging sharpness, the heights in different areas can be known according to the look-up table,finally the embossed object on can be successfully reconstructed. Its feasibility is demonstrated by simulation,and its effectiveness is proved by 3D shape reconstruction experiment of the number “0” in a coin with the error range from -2μm to 2μm.

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付光凯,曹益平.一种基于清晰度的显微浮雕轮廓术[J].光电子激光,2018,29(8):837~843

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  • 收稿日期:2018-01-04
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  • 在线发布日期: 2018-09-11
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