GaP表面粗化对AlGaInP发光二极管光电特性的影响
DOI:
CSTR:
作者:
作者单位:

(扬州乾照光电有限公司, 江苏 扬州 225101)

作者简介:

肖和平(1984-),男,四川泸州人,硕士,主要从事LED芯片工艺、半导体材料特性等方面的研究.

通讯作者:

中图分类号:

基金项目:


Influence of GaP roughening for AlGaInP LED photoelectric characteristics
Author:
Affiliation:

(Yangzhou Changelight Co.Ltd,Jiangsu Yangzhou 225101,China)

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    采用湿法溶液粗化AlGaInP基红光LED表面GaP层 ,并在粗化后的GaP表面沉积ITO,研究了粗化时间对GaP表面形貌的影响,并利用SEM、半导 体 芯片测试机、X射线衍射仪、X射线光电子能谱对LED器件表面形貌、光电特性曲 线、界面晶向、元素特性进行表征,比较了粗化前后的LED亮度和光电特性变 化。测试结果表明:采用HIO4、I2、HNO3系列粗化液在室温、粗化时间为30 S 时,有效增加了光在通过GaP面与ITO界面时的出光角度,使AlGaInP发光二极管 的发光效率提高21.4%,同时引起界面处的缺陷密度升高,费米能级 远离价带,主波长蓝移0.36 nm,正向电压上升0.04 V。

    Abstract:

    The wet method is used to roughen the GaP layer on the AlGaInP-based red LED surface and deposit the ITO on the roughened GaP surface. The effect of roughening time on the surface morphology of GaP is studied. Scan electron microscopy(SEM),semiconductor wafer tester, X-ray diffractometer (XRD) and X-ray photoelectron spectroscopy (XPS) are used to characterize the morphology,optical and electrical characteristics,interfacial orientation and elemental properties of the LED devices. The brightness of the LED before and after coarseni ng and changes in the photoelectric properties are analyzed.The test results show that the HI O4,I2,HNO3series roughening solution can effectively increase the light output angle through the GaP surface and the ITO interface at room temperature,and the roughening time of 30s can improve the li ght emitting efficiency of the AlGaInP LED by 21.4%.At the same time,the defect density at t he interface is increased,which leads to the Fermi level away from the valence band ,resulting in a forward voltage increase of 0.04V and dominant blue shift of wavelength of 0.36nm.

    参考文献
    相似文献
    引证文献
引用本文

肖和平,朱迪. GaP表面粗化对AlGaInP发光二极管光电特性的影响[J].光电子激光,2018,29(12):1275~1280

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2018-05-26
  • 最后修改日期:
  • 录用日期:
  • 在线发布日期: 2019-01-06
  • 出版日期:
文章二维码