多脉冲飞秒激光烧蚀铝靶动态特性研究
DOI:
CSTR:
作者:
作者单位:

(1. 天津科技大学 理学院物理系,天津 300222; 2.南开大学 现代光学 研究所,天津 300350)

作者简介:

吴泽华(1977-),男,生于辽宁,博士,讲师,主要从事飞 秒激光超快现象的研究.

通讯作者:

中图分类号:

基金项目:

天津市高等学校科技发展基金项目(20140902)和天津市自然科学基金(16JCQNJC01900) 资助项目 (1. 天津科技大学 理学院物理系,天津 300222; 2.南开大学 现代光学 研究所,天津 300350)


Study of dynamic process in multiple pulses ablation of aluminum by femtosecond laser
Author:
Affiliation:

(1.Department of physics,School of Science,Tianjin University of Science & Tech nology,Tianjin 300222,China; 2.Institute of Modern Optics,Nankai University,Tianjin 300350,Chin a)

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    利用时间分辨阴影图研究了脉冲能量在200微焦的多脉冲飞 秒激光烧蚀铝靶的动态过程、并使用 扫描电镜研究了靶材表面烧蚀区域的形貌特征。时间分辨阴影图的记录结果表明,在不同时 间延迟条件 下,飞秒激光烧蚀铝靶形成的冲击波体积和喷射物的空间分布均随着脉冲个数的增加而发生 不同程度的变 化,尤其是单脉冲烧蚀情况下在1ns延时阴影图中观察到的近同心圆条纹会随着脉冲数目增 加逐渐变得模 糊乃至消失。烧蚀区的电子扫描显微镜图像清楚地揭示出烧蚀过程中伴随有液态铝的产生, 其溅射凝固后 在靶材表面形成小球和细丝状微纳结构。实验结果进一步证实了由前序脉冲烧蚀导致的铝靶 表面结构的改 变会对后继脉冲的烧蚀产生显著影响,从而使多脉冲烧蚀表现出明显不同于单脉冲烧蚀的特 性。这些结果 对飞秒激光脉冲沉积薄膜、直写生成表面微结构等应用的工艺参数优化具有很好的指导意义 。

    Abstract:

    Ablation of aluminum target by multipl e femtosecond laser pulses is investigated by recording the time-resolved shado wgraphs of the dynamic ablation process.The scanning electron microscopic (SEM) measurements of the ablation sites are performed to analyze the surface morphology and its in fluence on the ablation process.With the help of shadowgraphs recorded at different time delays,it is fo und that the spatial distribution of the ejected material and the expansion of the shock wave generated during the ablation vary noticeably with the number of laser pulses.For the initial one or two pulses,nearly concentric a nd semicircular stripes within the shock wave front are observed at 1ns delay time.For subsequent pulses,howev er,such stripes become blurred and almost invisible.The SEM images of the ablation sites reveal some m icro- and nano-structures formed by condensed aluminum droplets and molten streams generated through laser ablation.Ablation by multiple femtosecond pulses exhibits different characteristics compared with the case by a single femtosecond pulse,which is primarily due to the surface morphology change induced by the pr eceding pulses on the target surface.These results should provide a meaningful guideline in applications of femtosecond laser such as pulsed laser deposition and micro-machining by direct laser writing.

    参考文献
    相似文献
    引证文献
引用本文

吴泽华,张楠,朱晓农.多脉冲飞秒激光烧蚀铝靶动态特性研究[J].光电子激光,2019,30(8):891~900

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2019-03-31
  • 最后修改日期:
  • 录用日期:
  • 在线发布日期: 2019-10-08
  • 出版日期:
文章二维码